Read e-book online Analysis and Design Principles of MEMS Devices PDF

By Minhang Bao

ISBN-10: 008045562X

ISBN-13: 9780080455624

ISBN-10: 0444516166

ISBN-13: 9780444516169

Sensors and actuators are actually a part of our lifestyle and seem in lots of home equipment, similar to vehicles, merchandising machines and washing machines. MEMS (Micro Electro Mechanical structures) are micro platforms such as micro mechanical sensors, actuators and micro digital circuits. a number of MEMS units were constructed and plenty of mass produced, however the info on those is largely dispersed within the literature. This publication provides the research and layout ideas of MEMS units. the knowledge is complete, targeting microdynamics, equivalent to the mechanics of beam and diaphragm constructions, air damping and its influence at the movement of mechanical constructions. utilizing useful examples, the writer examines difficulties linked to research and layout, and options are integrated behind the publication. the precise complicated point textbook for graduates, Analysis and layout ideas of MEMS Devices is an acceptable resource of reference for researchers and engineers within the box.

* provides the research and layout rules of MEMS units extra systematically than ever before.

* contains the theories crucial for the research and layout of MEMS comprises the dynamics of micro mechanical structures

* an issue part is incorporated on the finish of every bankruptcy with solutions supplied on the finish of the e-book.

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Sample text

Micro Mechanical Electric Switch Electric switches (or relays) are very important devices in communication and control systems. For example, electric switches are widely used in microwave and millimeter wave integrated circuits (MMICs) for telecommunication applications including signal routing, impedance matching networks, adjustable gain amplifiers and so forth. The state-of-the-art technology uses solid-state switches such as GaAs MESFETs and PFN diodes. However, these solid-state switches have a large insertion loss in the "on" state, and a poor electrical isolation in the "off state when the signal frequency is in GHz level.

796xl(r11Pa. 1. 24), we can find the three independent components for (E). 796x10" Pa However, in an arbitrary coordinate system (x'-y'-z') instead of a crystallographic coordinate system (X-Y-Z), the mechanical parameters are orientation dependent. As an example, let us consider a coordinate system with its x'-axis in [110] direction, y-axis in v [110] direction and z'-axis in [001] direction. The compliance coefficient tensor (Z') in the coordinate system {x'-y'-z') can be found from (E) in the crystallographic coordinate system through coordinate transformation of the tensor of the forth rank.

15) indicate that a shearing strain component depends only on the corresponding shearing stress component. 1. 4. General Relations Between Stress and Strain Generally speaking, a crystal is anisotropic in its mechanical properties. Therefore, the general relation between stress (T) and strain tensors (e) is described by a matrix equation (e) = (2)(r) A component of the strain tensor (e) can be expressed as k,l As (e) and (7) are both second rank tensors with 3x3 components so (E) is a forth rank tensor with 9x9 components.

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Analysis and Design Principles of MEMS Devices by Minhang Bao

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